配备有各种电性、化学、材料、表面和微细分析、失效分析、新产品设计查错等先进设备。
Equipment |
Vendor & Model |
Time Resolved Backside Signal Acquisition System |
Optonnics EmiScope-II |
SEM with EDX and Voltage Contrast |
FEI Quanta 600 |
ESD (HBM/MM) & Latch-up Testter |
Thermo KeyTek ZapMaster MK 2 |
WSD Tester (CDM) |
Thermo KeyTek RCDM3 |
Scanning Acoustic Microscope |
KSI WIN SAM-Vario III |
Focused Ion Beam System |
Credence OptiFIB |
Emission Microscope, EMMI |
Credence Meridian |
Confocal Microscope |
Keyence V-9510 |
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